Order backlog of 163 lithography systems – 135 new and 28 refurbished systems – valued at EUR 1,357 million as of March 28, 2004.
Q4 2003: 124 systems / EUR 993 million value

Q1 2003: 93 systems / EUR 889 million value

Total sales of EUR 453 million
Q4 2003: Total sales of EUR 526 million

Q1 2003: Total sales of EUR 318 million

Net profit of EUR 21 million
Q4 2003: Net profit of EUR 16 million

Q1 2003: Net loss of EUR 82 million

Net cash provided from operating and investing activities of EUR 111 million
Q4 2003: Net cash provided of EUR 245 million

Q1 2003: Net cash provided of EUR 40 million