Technology Leadership and Process Performance Achieve Wide Adoption in
High Volume Manufacturing.
ALMERE, The Netherlands - July 12, 2011 - ASM International N.V. (NASDAQ: ASMI and Euronext Amsterdam: ASM) today announced that it has shipped over 500 atomic layer deposition (ALD) reactors for use in semiconductor manufacturing to date. The company now has ALD reactors in high volume manufacturing at a majority of advanced logic and memory fabs worldwide. This includes Plasma Enhanced ALD which provides advantages for certain applications, such as very low temperature processing.

ASM delivers the industry's broadest portfolio of ALD configurations and applications and is the only supplier in the market shipping both single wafer and batch ALD tools. ASM's plasma and thermal ALD systems are used in high volume manufacturing for a wide range of applications, including high-k and metals for advanced transistor gates, capacitor dielectrics and electrodes, and spacers for double patterning, among others.

Recognizing the value and importance of ALD to the future of semiconductor manufacturing, ASM has established ALD centers of excellence in Europe, U.S. and Asia for material and precursor research, product development and process integration. These innovative in-house R&D program investments have uniquely positioned ASM to bring ALD (thermal and plasma) to high volume manufacturing and enable its customers to achieve the performance required for the most advanced semiconductor devices.

About ASM International

ASM International N.V., headquartered in Almere, the Netherlands, and its subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing (Front-end segment) as well as assembly and packaging (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on NASDAQ (symbol ASMI) and the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's website at www.asm.com