ALMERE, The Netherlands - October 29, 2009 - ASM International N.V. (NASDAQ: ASMI and Euronext Exchange in Amsterdam: ASM) announced that a leading logic manufacturer, a member of a key semiconductor industry technology alliance, has decided to purchase a Pulsar® high-k atomic layer deposition (ALD) tool. The system, delivered earlier this month, will be used to deposit hafnium-based higk-k gate dielectrics for 32 and 28 nm logic chips.

"This order is highly representative of ASM's core strength of taking customers from process development to high volume manufacturing," said Glen Wilk, product manager for ALD and Epitaxy at ASM. "We have worked with this customer extensively to demonstrate the Pulsar reactor's ability to scale the gate dielectric and overcome all the challenges of integrating high-k into their device. We have now entered the next phase of our collaboration and are actively engaged in the successful transition to volume manufacturing."

Pulsar is the industry's leading ALD process tool, and the first to be used in high volume manufacturing of high-k logic gates. Initially implemented at the 45 nm node, the Pulsar has been qualified for high volume manufacturing down to the 28 nm node. ASM enables advanced high-k and metal gate integration solutions through Pulsar's ALD process that deposits one atomic layer at a time, enabling faster and smaller chips.

ASM also delivers a broad portfolio of high-k gate films including multiple hafnium-based oxides that enable high-k integration for both high performance and low standby power devices and are already proven through the 22 nm node.


ASM International N.V. completes divesture of RTP business


ALMERE, The Netherlands - October 29, 2009 - ASM International N.V. (NASDAQ: ASMI and Euronext Exchange in Amsterdam: ASM) today announced that it has signed and completed the contract to divest its Levitor RTP business to Levitech, a company controlled and managed by the current RTP business unit management. As already mentioned in the press release of June 10, the Levitech management will take over all current Levitor business, including its approximately 20 employees and customer service, and will develop new RTP-related products. The divested RTP business will be for the risk and account of Levitech as of 18 June 2009. ASM is providing € 4 million working capital, which has been expensed during the second quarter, and will have a non-controlling minority share in the company.