Neon reduction program enables chipmakers to reduce operating costs, while maintaining high performance across all conditions.

San Diego, California, July 13, 2015 - Cymer, an ASML company, an industry leader in developing lithography light sources used by chipmakers to pattern advanced semiconductor chips, today announced a neon gas reduction program for the installed base of argon fluoride (ArF) and krypton fluoride (KrF) light sources. The program includes new light source software to reduce neon consumption across the installed base of light sources, rapid qualification of new gas suppliers, and a light source upgrade to enable reclaim of used neon, allowing gas suppliers to reuse existing neon and further reduce the need for additional supplies. The neon gas reduction program has been put in place by Cymer to reduce dependence on neon, a key gas for operation of the light source, and to insulate our customers from fluctuations of neon supply.

"Chipmakers are concerned about recent escalation of neon prices and supply continuity," said David Knowles, Vice President and General Manager of Cymer Light Source. "We have worked in close cooperation with our customers on an aggressive program to develop, qualify and introduce improvements for the installed base of ArF and KrF light sources that enable significant reductions in neon consumption while ensuring system performance."

The neon reduction program is currently underway with customers participating in OnPulse, Cymer's industry leading support program for light source maintenance, receiving the light source improvements without additional cost as part of the continuing benefits of OnPulse subscription coverage. This furthers Cymer commitment to reducing customer dependence on process gasses, having introduced a helium reduction kit earlier this year for all OnPulse customers.

About Cymer
Cymer, an ASML company, is an industry leader in developing lithography light sources, used by chipmakers worldwide to pattern advanced semiconductor chips. Cymer's light sources, and ongoing innovations, are available to all semiconductor and semiconductor equipment companies to enable advanced device manufacturing today and into the future. Cymer is pioneering the industry's transition to EUV light source technology, the next viable step on the technology roadmap for the creation of smaller, faster and more energy-efficient chips. The company is headquartered in San Diego, California. www.cymer.com